Method for temperature stabilization of the resonance frequency of micromechanical semiconductor resonators

Tthe invention aim is to provide a method for the fabrication of silicon micromechanical resonators that are temperature stable and therefore integrable with consumer electronic devices.

Settore:

Industry 4.0,
Energy

Research Institution:

Università di Pisa

Publication number:

ITUB20160061A1

Technologies, Systems, Applications:

Process and product technologyes and design,
Wireless e wired networks, comunication systems and technologies,
Advanced materials development and characterization

Technological Priority:

Photonic solutions, micro and nanoelectronics
Pubblicato il:
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