Method for temperature stabilization of the resonance frequency of micromechanical semiconductor resonators

Tthe invention aim is to provide a method for the fabrication of silicon micromechanical resonators that are temperature stable and therefore integrable with consumer electronic devices.

Settore:

Energy,
Industry 4.0

Research Institution:

Università di Pisa

Publication number:

ITUB20160061A1

Technologies, Systems, Applications:

Advanced materials development and characterization,
Process and product technologyes and design,
Wireless e wired networks, comunication systems and technologies

Technological Priority:

Photonic solutions, micro and nanoelectronics